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WF6
WF6 is used in the semiconductor process.
It makes contact plugs during CVD process.
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Specification |
Analyzer |
| Purity |
WF6 |
99.9995% |
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| Impurity |
Metallic
(Wt. ppb) |
Al |
<10 |
ICP-MS |
| Ca |
<70 |
ICP-MS |
| Cr |
<10 |
ICP-MS |
| Cu |
<10 |
ICP-MS |
| Fe |
<30 |
ICP-MS |
| K |
<10 |
ICP-MS |
| Mg |
<10 |
ICP-MS |
| Mo |
<50 |
ICP-MS |
| Na |
<10 |
ICP-MS |
| Ni |
<10 |
ICP-MS |
| Th |
<0.1 |
ICP-MS |
| U |
<0.1 |
ICP-MS |
| Zn |
<10 |
ICP-MS |
Gases
(Vol. ppm) |
O₂ + Ar |
<1 |
GC |
| N₂ |
<1 |
GC |
| HF |
<1 |
FT-IR |
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3.4ℓ |
10ℓ |
20ℓ |
40ℓ |
| Filling |
4 ~ 8Kg |
12.5 ~ 25Kg |
25 ~ 50Kg |
50 ~ 100Kg |
| Container Material |
SUS 316L |
| Valve |
CGA638, CGA670, JIS 22 14R |
| Shelf Life |
1year |
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http://www.ocim.co.kr
